S01600 - SEMI S16 - Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life Revision:SEMI S16-0600 - Superseded This Standard specifies measurement methods

This Standard specifies measurement methods

or particles

such as cell controllers or recipe servers

orgで入手可能となる。初版は2011年6月発行。前版は2012年3月発行。

Semiconductor processing equipment is especially vulnerable to voltage sags

S01600 - SEMI S16 - Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life Revision:SEMI S16-0600 - Superseded This Standard specifies measurement methodsThis Standard was technically approved by the Environmental, Health, & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18, 2012. Available at www. semiviews. org and www. semi. org in August 2012; originally published June 2000; previously published March 2007. NOTICE: This Document was reapproved with minor editorial changes. NOTICE: This Standard or Safety Guideline